Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664167 | Memory with trench capacitor and selection transistor and method for fabricating it | Dietmar Temmler, Herbert Benzinger, Wolfram Karcher, Catharina Pusch, Jurgen Faul | 2003-12-16 |
| 6608341 | Trench capacitor with capacitor electrodes | — | 2003-08-19 |
| 6580110 | Trench capacitor and method for fabricating a trench capacitor | — | 2003-06-17 |
| 6580118 | Non-volatile semiconductor memory cell having a metal oxide dielectric, and method for fabricating the memory cell | Christoph Ludwig | 2003-06-17 |
| 6548850 | Trench capacitor configuration and method of producing it | Stefan Gernhard, Klaus-Dieter Morhard | 2003-04-15 |
| 6537926 | Process for improving the thickness uniformity of a thin oxide layer in semiconductor wafer fabrication | Helmut Tews | 2003-03-25 |
| 6528384 | Method for manufacturing a trench capacitor | Gustav Beckmann, Moritz Haupt, Anke Krasemann, Alexandra Lamprecht, Dietmar Ottenwalder +1 more | 2003-03-04 |
| 6509599 | Trench capacitor with insulation collar and method for producing the trench capacitor | Kai Wurster, Jurgen Faul, Klaus-Dieter Morhard, Alexandra Lamprecht, Odile Dequiedt | 2003-01-21 |