Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645839 | Method for improving a doping profile for gas phase doping | Anja Morgenschweis, Dietmar Ottenwalder, Uwe Schroder | 2003-11-11 |
| 6528384 | Method for manufacturing a trench capacitor | Gustav Beckmann, Anke Krasemann, Alexandra Lamprecht, Dietmar Ottenwalder, Jens-Uwe Sachse +1 more | 2003-03-04 |