Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645839 | Method for improving a doping profile for gas phase doping | Moritz Haupt, Anja Morgenschweis, Uwe Schroder | 2003-11-11 |
| 6528384 | Method for manufacturing a trench capacitor | Gustav Beckmann, Moritz Haupt, Anke Krasemann, Alexandra Lamprecht, Jens-Uwe Sachse +1 more | 2003-03-04 |
| 6528433 | Method for monitoring nitrogen processes | Thomas Gartner, Alexandra Lamprecht, Jörg Schulze | 2003-03-04 |