Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664167 | Memory with trench capacitor and selection transistor and method for fabricating it | Dietmar Temmler, Herbert Benzinger, Wolfram Karcher, Martin Schrems, Jurgen Faul | 2003-12-16 |
| 6605487 | Method for the manufacture of micro-mechanical components | Martin Franosch, Reinhard Wittmann | 2003-08-12 |