Issued Patents 2003
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660645 | Process for etching an organic dielectric using a silyated photoresist mask | Scott A. Bell, Christopher F. Lyons, Marina V. Plat, Ramkumar Subramanian | 2003-12-09 |
| 6641747 | Method and apparatus for determining an etch endpoint | Ercan Adem | 2003-11-04 |
| 6635409 | Method of strengthening photoresist to prevent pattern collapse | Christopher F. Lyons, Scott A. Bell, Marina V. Plat | 2003-10-21 |
| 6633083 | Barrier layer integrity test | Christy Mei-Chu Woo, Young-Chang Joo | 2003-10-14 |
| 6615400 | Optimizing dense via arrays of shrunk integrated circuit designs | — | 2003-09-02 |
| 6566214 | Method of making a semiconductor device by annealing a metal layer to form metal silicide and using the metal silicide as a hard mask to pattern a polysilicon layer | Christopher F. Lyons, Ramkumar Subramanian, Scott A. Bell, Marina V. Plat | 2003-05-20 |
| 6563221 | Connection structures for integrated circuits and processes for their formation | Scott A. Bell, Christopher F. Lyons, Marina V. Plat, Ramkumar Subramanian | 2003-05-13 |
| 6548423 | Multilayer anti-reflective coating process for integrated circuit fabrication | Marina V. Plat, Christopher F. Lyons, Scott A. Bell | 2003-04-15 |
| 6534224 | Phase shift mask and system and method for making the same | — | 2003-03-18 |
| 6528372 | Sidewall spacer definition of gates | Christopher F. Lyons | 2003-03-04 |
| 6524947 | Slotted trench dual inlaid structure and method of forming thereof | Ramkumar Subramanian, Fei Wang | 2003-02-25 |
| 6514802 | Method of providing a frontside contact to a substrate of SOI device | Kurt Taylor | 2003-02-04 |
| 6516450 | Variable design rule tool | Wiley Eugene Hill, Kurt Taylor, Chern-Jiann Lee, Rithy Hang | 2003-02-04 |