Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627973 | Void-free interlayer dielectric (ILD0) for 0.18-micron flash memory semiconductor device | Minh Van Ngo, Robert A. Huertas, Lu You, Pei-Yuan Gao | 2003-09-30 |
| 6603211 | Method and system for providing a robust alignment mark at thin oxide layers | Michael K. Templeton, Hao Fang, Maria C. Chan | 2003-08-05 |