Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670022 | Nanoporous dielectric films with graded density and process for making such films | Stephen Wallace, Douglas M. Smith, Teresa Ramos, Kevin H. Rodrick | 2003-12-30 |
| 6610145 | Deposition of nanoporous silica films using a closed cup coater | Neil H. Hendricks, Douglas M. Smith, Teresa Ramos | 2003-08-26 |
| 6605362 | Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography | Teresa Baldwin, Mary Richey, Hui-Jung Wu, Richard Spear | 2003-08-12 |
| 6589889 | Contact planarization using nanoporous silica materials | Denis Endisch | 2003-07-08 |
| 6559071 | Process for producing dielectric thin films | Teresa Ramos, Douglas M. Smith, Rick J. Roberts | 2003-05-06 |
| 6518205 | Multifunctional reagents for the surface modification of nanoporous silica films | Hui-Jung Wu, Douglas M. Smith, Teresa Ramos, Stephen Wallace, Neil Viernes | 2003-02-11 |
| 6503850 | Process for producing nanoporous dielectric films at high pH | Stephen Wallace, Douglas M. Smith, Teresa Ramos, Kevin Roderick, Lisa Brungardt | 2003-01-07 |