Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605362 | Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography | Mary Richey, James Drage, Hui-Jung Wu, Richard Spear | 2003-08-12 |
| 6506497 | Spin-on-glass anti-reflective coatings for photolithography | Joseph Kennedy, Nigel Hacker, Richard Spear | 2003-01-14 |