Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670022 | Nanoporous dielectric films with graded density and process for making such films | Douglas M. Smith, Teresa Ramos, Kevin H. Rodrick, James Drage | 2003-12-30 |
| 6518205 | Multifunctional reagents for the surface modification of nanoporous silica films | Hui-Jung Wu, James Drage, Douglas M. Smith, Teresa Ramos, Neil Viernes | 2003-02-11 |
| 6503850 | Process for producing nanoporous dielectric films at high pH | Douglas M. Smith, Teresa Ramos, Kevin Roderick, James Drage, Lisa Brungardt | 2003-01-07 |