Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670022 | Nanoporous dielectric films with graded density and process for making such films | Stephen Wallace, Douglas M. Smith, Kevin H. Rodrick, James Drage | 2003-12-30 |
| 6645878 | Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates | Douglas M. Smith, Gregory P. Johnston, William C. Ackerman, Richard Stoltz, Alok Maskara +2 more | 2003-11-11 |
| 6610145 | Deposition of nanoporous silica films using a closed cup coater | Neil H. Hendricks, Douglas M. Smith, James Drage | 2003-08-26 |
| 6559071 | Process for producing dielectric thin films | Douglas M. Smith, James Drage, Rick J. Roberts | 2003-05-06 |
| 6518205 | Multifunctional reagents for the surface modification of nanoporous silica films | Hui-Jung Wu, James Drage, Douglas M. Smith, Stephen Wallace, Neil Viernes | 2003-02-11 |
| 6503850 | Process for producing nanoporous dielectric films at high pH | Stephen Wallace, Douglas M. Smith, Kevin Roderick, James Drage, Lisa Brungardt | 2003-01-07 |