Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653718 | Dielectric films for narrow gap-fill applications | Roger Leung, Songyuan Xie, Nigel Hacker, Yanpei Deng | 2003-11-25 |
| 6589889 | Contact planarization using nanoporous silica materials | James Drage | 2003-07-08 |
| 6565920 | Edge bead removal for spin-on materials containing low volatility solvents fusing carbon dioxide cleaning | — | 2003-05-20 |