Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443641 | Substrate process method and substrate process apparatus | Hideyuki Takamori, Kiyohisa Tateyama, Kengo Mizosaki, Noriyuki Anai, Mitsuhiro Sakai +2 more | 2002-09-03 |
| 6398879 | Method and apparatus for cleaning treatment | Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Kiyomitsu Yamaguchi, Kimio Motoda +1 more | 2002-06-04 |
| 6391110 | Method and apparatus for cleaning treatment | Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Kiyomitsu Yamaguchi, Tetsuya Sada +1 more | 2002-05-21 |