Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451515 | Substrate treating method | Hideyuki Takamori, Kiyohisa Tateyama, Noriyuki Anai, Yoshitaka Matsuda | 2002-09-17 |
| 6443641 | Substrate process method and substrate process apparatus | Hideyuki Takamori, Kiyohisa Tateyama, Noriyuki Anai, Mitsuhiro Sakai, Shinobu Tanaka +2 more | 2002-09-03 |