Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451515 | Substrate treating method | Hideyuki Takamori, Kengo Mizosaki, Noriyuki Anai, Yoshitaka Matsuda | 2002-09-17 |
| 6443641 | Substrate process method and substrate process apparatus | Hideyuki Takamori, Kengo Mizosaki, Noriyuki Anai, Mitsuhiro Sakai, Shinobu Tanaka +2 more | 2002-09-03 |
| 6391110 | Method and apparatus for cleaning treatment | Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi +1 more | 2002-05-21 |
| 6361600 | Film forming apparatus and film forming method | Tsutae Omori | 2002-03-26 |