FS

Fumio Satou

TL Tokyo Electron Limited: 2 patents #58 of 413Top 15%
Overall (2002): #65,485 of 266,432Top 25%
2
Patents 2002

Issued Patents 2002

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6398879 Method and apparatus for cleaning treatment Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi, Kimio Motoda +1 more 2002-06-04
6391110 Method and apparatus for cleaning treatment Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi, Tetsuya Sada +1 more 2002-05-21