Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458208 | Film forming apparatus | Noriyuki Anai, Tsutae Omori, Masaaki Takizawa | 2002-10-01 |
| 6447608 | Spin coating apparatus | Hideyuki Takamori, Masafumi Nomura | 2002-09-10 |
| 6443641 | Substrate process method and substrate process apparatus | Hideyuki Takamori, Kiyohisa Tateyama, Kengo Mizosaki, Noriyuki Anai, Shinobu Tanaka +2 more | 2002-09-03 |
| 6398879 | Method and apparatus for cleaning treatment | Fumio Satou, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi, Kimio Motoda +1 more | 2002-06-04 |
| 6391110 | Method and apparatus for cleaning treatment | Fumio Satou, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi, Tetsuya Sada +1 more | 2002-05-21 |