Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429129 | Method of using silicon rich carbide as a barrier material for fluorinated materials | Xu Yi, Simon Chooi, Mei Sheng Zhou, Joseph Xie | 2002-08-06 |
| 6424044 | Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization | Xu Yi, Joseph Xie, Mei Sheng Zhou, Simon Chooi | 2002-07-23 |
| 6352921 | Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization | Yi Xu, Joseph Xie, Mei Sheng Zhou, Simon Chooi | 2002-03-05 |