Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472962 | Inductor-capacitor resonant RF switch | Lihui Guo | 2002-10-29 |
| 6429129 | Method of using silicon rich carbide as a barrier material for fluorinated materials | Licheng M. Han, Xu Yi, Simon Chooi, Mei Sheng Zhou | 2002-08-06 |
| 6424044 | Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization | Licheng M. Han, Xu Yi, Mei Sheng Zhou, Simon Chooi | 2002-07-23 |
| 6387798 | Method of etching trenches for metallization of integrated circuit devices with a narrower width than the design mask profile | Nelson Chou San Loke, Mukherjee-Roy Moitreyee | 2002-05-14 |
| 6352921 | Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization | Licheng M. Han, Yi Xu, Mei Sheng Zhou, Simon Chooi | 2002-03-05 |