Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476489 | Apparatus and manufacturing method for semiconductor device adopting NA interlayer contact structure | Bong-young Yoo, Dae-hong Ko, Nae-In Lee | 2002-11-05 |
| 6468924 | Methods of forming thin films by atomic layer deposition | Seung Hwan Lee, Yeong-kwan Kim, Dong Chan Kim | 2002-10-22 |
| 6426308 | Methods for forming films having high dielectric constants | Moon-Yong Lee, Kyung-hun Kim, In Sung Park | 2002-07-30 |
| 6416584 | Apparatus for forming a film on a substrate | Seok-Jun Won, Yong-Woo Hyung | 2002-07-09 |
| 6412797 | Front wheel suspension system for a vehicle | — | 2002-07-02 |
| 6403495 | Capacitor fabricating method of semiconductor device | Young Sun Kim | 2002-06-11 |
| 6391803 | Method of forming silicon containing thin films by atomic layer deposition utilizing trisdimethylaminosilane | Yeong-kwan Kim, Seung Hwan Lee | 2002-05-21 |