Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472319 | Method for manufacturing capacitor of semiconductor memory device by two-step thermal treatment | Yun-Jung Lee, Soon-yeon Park, Cha-young Yoo, Doo-sup Hwang, Eun-Ae Chung +1 more | 2002-10-29 |
| 6416584 | Apparatus for forming a film on a substrate | Young-Wook Park, Yong-Woo Hyung | 2002-07-09 |