Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489214 | Method for forming a capacitor of a semiconductor device | In-seon Park, Sang Min Lee, Chang-Soo Park | 2002-12-03 |
| 6468924 | Methods of forming thin films by atomic layer deposition | Seung Hwan Lee, Dong Chan Kim, Young-Wook Park | 2002-10-22 |
| 6391803 | Method of forming silicon containing thin films by atomic layer deposition utilizing trisdimethylaminosilane | Young-Wook Park, Seung Hwan Lee | 2002-05-21 |
| 6335240 | Capacitor for a semiconductor device and method for forming the same | In-seon Park, Sang Min Lee, Chang-Soo Park | 2002-01-01 |