Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468924 | Methods of forming thin films by atomic layer deposition | Seung Hwan Lee, Yeong-kwan Kim, Young-Wook Park | 2002-10-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468924 | Methods of forming thin films by atomic layer deposition | Seung Hwan Lee, Yeong-kwan Kim, Young-Wook Park | 2002-10-22 |