Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486039 | Method of fabricating a trench isolation structure having sidewall oxide layers with different thicknesses | Jae-Yoon Yoo, Jeong S. Lee | 2002-11-26 |
| 6476489 | Apparatus and manufacturing method for semiconductor device adopting NA interlayer contact structure | Bong-young Yoo, Dae-hong Ko, Young-Wook Park | 2002-11-05 |
| 6461984 | Semiconductor device using N2O plasma oxide and a method of fabricating the same | Chui-Hi Han, Sung-Hoi Hur, Jin Woo Lee | 2002-10-08 |