Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402598 | Chemical mechanical polishing apparatus and method of washing contaminants off of the polishing head thereof | Byung-Moo Lee, Jae Won Choi, Tae Ho Kim | 2002-06-11 |
| 6370793 | Apparatus for controlling the temperature of a wafer located at a pre-alignment stage | Hee-Sun Chae, Jae Il Kim | 2002-04-16 |