Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402598 | Chemical mechanical polishing apparatus and method of washing contaminants off of the polishing head thereof | Yo-Han Ahn, Byung-Moo Lee, Jae Won Choi | 2002-06-11 |
| 6387333 | Gas purifying system | Jung-Sung Hwang, Soon Young LEE, Jae-heung Choi | 2002-05-14 |