Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402598 | Chemical mechanical polishing apparatus and method of washing contaminants off of the polishing head thereof | Yo-Han Ahn, Jae Won Choi, Tae Ho Kim | 2002-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402598 | Chemical mechanical polishing apparatus and method of washing contaminants off of the polishing head thereof | Yo-Han Ahn, Jae Won Choi, Tae Ho Kim | 2002-06-11 |