Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6445443 | Lithography system including mechanism for setting optimal process parameters and method of operating the same | Chan Hoon Park | 2002-09-03 |
| 6370793 | Apparatus for controlling the temperature of a wafer located at a pre-alignment stage | Jae Il Kim, Yo-Han Ahn | 2002-04-16 |