Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6370793 | Apparatus for controlling the temperature of a wafer located at a pre-alignment stage | Hee-Sun Chae, Yo-Han Ahn | 2002-04-16 |
JK
Jae Il Kim
Overall (2002): #197,880 of 266,432Top 75%
1
Patents 2002