Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486941 | Guideless stage | Bausan Yuan | 2002-11-26 |
| 6437463 | Wafer positioner with planar motor and mag-lev fine stage | W. Thomas Novak, Akimitsu Ebihara | 2002-08-20 |
| 6405659 | Monolithic stage | — | 2002-06-18 |
| 6373153 | Stage device, and exposure apparatus with linear motor having polygonal shaped coil units | Thomas Novak | 2002-04-16 |
| 6355993 | Linear motor having polygonal shaped coil units | W. Thomas Novak | 2002-03-12 |