Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6437463 | Wafer positioner with planar motor and mag-lev fine stage | Andrew J. Hazelton, W. Thomas Novak | 2002-08-20 |
| 6396589 | Apparatus and method for measuring three-dimensional shape of object | — | 2002-05-28 |
| 6391503 | Scanning exposure methods | — | 2002-05-21 |
| 6363809 | Precision scanning apparatus and method with fixed and movable guide members | W. Thomas Novak, Zahirudeen Premji, Uday Nayak | 2002-04-02 |