Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499880 | Static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda +1 more | 2002-12-31 |
| 6478136 | Method and apparatus for automatically transporting and precisely positioning work pieces at processing stations | — | 2002-11-12 |
| 6467960 | Air bearing linear guide for use in a vacuum | Douglas C. Watson | 2002-10-22 |
| 6437463 | Wafer positioner with planar motor and mag-lev fine stage | Andrew J. Hazelton, Akimitsu Ebihara | 2002-08-20 |
| 6363809 | Precision scanning apparatus and method with fixed and movable guide members | Zahirudeen Premji, Uday Nayak, Akimitsu Ebihara | 2002-04-02 |
| 6355993 | Linear motor having polygonal shaped coil units | Andrew J. Hazelton | 2002-03-12 |