Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499880 | Static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Toshimasa Shimoda, Douglas C. Watson +1 more | 2002-12-31 |
| 6351041 | Stage apparatus and inspection apparatus having stage apparatus | — | 2002-02-26 |