Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499880 | Static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda +1 more | 2002-12-31 |
| 6467960 | Air bearing linear guide for use in a vacuum | W. Thomas Novak | 2002-10-22 |
| 6408767 | Low stiffness suspension for a stage | Mike Binnard | 2002-06-25 |