Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6373153 | Stage device, and exposure apparatus with linear motor having polygonal shaped coil units | Andrew J. Hazelton | 2002-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6373153 | Stage device, and exposure apparatus with linear motor having polygonal shaped coil units | Andrew J. Hazelton | 2002-04-16 |