Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486941 | Guideless stage | Andrew J. Hazelton | 2002-11-26 |
| 6472777 | Capacitive sensor calibration method and apparatus for opposing electro-magnetic actuators | Ting-Chien Teng | 2002-10-29 |