Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492735 | Semiconductor device with alloy film between barrier metal and interconnect | — | 2002-12-10 |
| 6458690 | Method for manufacturing a multilayer interconnection structure | Toshiyuki Takewaki, Manabu Iguchi | 2002-10-01 |
| 6379782 | Semiconductor device formed with metal wiring on a wafer by chemical mechanical polishing, and method of manufacturing the same | Manabu Iguchi, Toshiyuki Takewaki | 2002-04-30 |
| 6372628 | Insulating film comprising amorphous carbon fluoride, a semiconductor device comprising such an insulating film, and a method for manufacturing the semiconductor device | Ko Noguchi, Shinya Ito, Noriaki Oda, Akira Matsumoto, Takashi Ishigami +5 more | 2002-04-16 |