Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436790 | Method for fabrication semiconductor device having trench isolation structure | — | 2002-08-20 |
| 6372628 | Insulating film comprising amorphous carbon fluoride, a semiconductor device comprising such an insulating film, and a method for manufacturing the semiconductor device | Yoshihisa Matsubara, Ko Noguchi, Noriaki Oda, Akira Matsumoto, Takashi Ishigami +5 more | 2002-04-16 |
| 6369382 | Mass spectrometry and mass spectroscope | Noriko Minakawa | 2002-04-09 |