Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492264 | Semiconductor device having a silicide layer with silicon-rich region and method for making the same | — | 2002-12-10 |
| 6372628 | Insulating film comprising amorphous carbon fluoride, a semiconductor device comprising such an insulating film, and a method for manufacturing the semiconductor device | Yoshihisa Matsubara, Ko Noguchi, Shinya Ito, Akira Matsumoto, Takashi Ishigami +5 more | 2002-04-16 |
| 6358802 | Method for manufacturing semiconductor device having a gate electrode film containing nitrogen | — | 2002-03-19 |