Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458690 | Method for manufacturing a multilayer interconnection structure | Yoshihisa Matsubara, Manabu Iguchi | 2002-10-01 |
| 6391774 | Fabrication process of semiconductor device | — | 2002-05-21 |
| 6379782 | Semiconductor device formed with metal wiring on a wafer by chemical mechanical polishing, and method of manufacturing the same | Manabu Iguchi, Yoshihisa Matsubara | 2002-04-30 |