Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495802 | Temperature-controlled chuck and method for controlling the temperature of a substantially flat object | John Maltabes, Alain Charles | 2002-12-17 |
| 6472237 | Method and system for determining a thickness of a layer | Larry E. Frisa | 2002-10-29 |
| 6420098 | Method and system for manufacturing semiconductor devices on a wafer | — | 2002-07-16 |
| 6362098 | Plasma-enhanced chemical vapor deposition (CVD) method to fill a trench in a semiconductor substrate | Terry A. Breeden, Iraj Shahvandi, Michael Tucker, Olivier Vatel, Ralf Zedlitz | 2002-03-26 |