Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495802 | Temperature-controlled chuck and method for controlling the temperature of a substantially flat object | John Maltabes, Karl Mautz | 2002-12-17 |
| 6420247 | Method of forming structures on a semiconductor including doping profiles using thickness of photoresist | John Maltabes | 2002-07-16 |