Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495802 | Temperature-controlled chuck and method for controlling the temperature of a substantially flat object | Alain Charles, Karl Mautz | 2002-12-17 |
| 6491451 | Wafer processing equipment and method for processing wafers | Timothy Stanley | 2002-12-10 |
| 6486049 | Method of fabricating semiconductor devices with contact studs formed without major polishing defects | Hans Zeindl | 2002-11-26 |
| 6420247 | Method of forming structures on a semiconductor including doping profiles using thickness of photoresist | Alain Charles | 2002-07-16 |