Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6362098 | Plasma-enhanced chemical vapor deposition (CVD) method to fill a trench in a semiconductor substrate | Terry A. Breeden, Iraj Shahvandi, Michael Tucker, Karl Mautz, Ralf Zedlitz | 2002-03-26 |