Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6470144 | Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby | Masayoshi Tarutani, Takaaki Kawahara, Mikio Yamamuka, Shigeru Matsuno, Takehiko Sato | 2002-10-22 |
| 6448191 | Method of forming high dielectric constant thin film and method of manufacturing semiconductor device | Takaaki Kawahara, Mikio Yamamuka, Masayoshi Tarutani, Takehiko Sato, Shigeru Matsuno | 2002-09-10 |
| 6420191 | Method of manufacturing semiconductor device which includes a capacitor having a lower electrode formed of iridium or ruthenium | Takeharu Kuroiwa, Tetsuro Makita, Noboru Mikami, Teruo Shibano | 2002-07-16 |