Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6470144 | Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby | Tsuyoshi Horikawa, Takaaki Kawahara, Mikio Yamamuka, Shigeru Matsuno, Takehiko Sato | 2002-10-22 |
| 6448191 | Method of forming high dielectric constant thin film and method of manufacturing semiconductor device | Takaaki Kawahara, Mikio Yamamuka, Tsuyoshi Horikawa, Takehiko Sato, Shigeru Matsuno | 2002-09-10 |