Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6470144 | Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby | Masayoshi Tarutani, Tsuyoshi Horikawa, Takaaki Kawahara, Mikio Yamamuka, Shigeru Matsuno | 2002-10-22 |
| 6448191 | Method of forming high dielectric constant thin film and method of manufacturing semiconductor device | Takaaki Kawahara, Mikio Yamamuka, Tsuyoshi Horikawa, Masayoshi Tarutani, Shigeru Matsuno | 2002-09-10 |
| 6423484 | Silver halide color photographic light-sensitive material | Yasuhiro Yoshioka, Osamu Takahashi, Toshio Kawagishi, Kozo Sato, Yuki Mizukawa | 2002-07-23 |