Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420191 | Method of manufacturing semiconductor device which includes a capacitor having a lower electrode formed of iridium or ruthenium | Takeharu Kuroiwa, Tsuyoshi Horikawa, Noboru Mikami, Teruo Shibano | 2002-07-16 |