Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458719 | LOW DIELECTRIC CONSTANT FILM COMPOSED OF BORON, NITROGEN, AND HYDROGEN HAVING THERMAL RESISTANCE, PROCESS FOR FORMING THE FILM, USE OF THE FILM BETWEEN SEMICONDUCTOR DEVICE LAYERS, AND THE DEVICE FORMED FROM THE FILM | Sei Tsunoda, Hideharu Nobutoki | 2002-10-01 |
| 6420191 | Method of manufacturing semiconductor device which includes a capacitor having a lower electrode formed of iridium or ruthenium | Takeharu Kuroiwa, Tsuyoshi Horikawa, Tetsuro Makita, Teruo Shibano | 2002-07-16 |
| 6344991 | Nonvolatile semiconductor memory device | Takeharu Kuroiwa | 2002-02-05 |