Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468925 | Plasma enhanced chemical vapor deposition process | Sujit Sharan, Craig M. Carpenter, Allen Mardian | 2002-10-22 |
| 6461436 | Apparatus and process of improving atomic layer deposition chamber performance | David J. Kubista | 2002-10-08 |
| 6412437 | Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition process | Sujit Sharan, Craig M. Carpenter, Allen Mardian | 2002-07-02 |