Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468925 | Plasma enhanced chemical vapor deposition process | Philip Campbell, Sujit Sharan, Craig M. Carpenter | 2002-10-22 |
| 6412437 | Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition process | Philip Campbell, Sujit Sharan, Craig M. Carpenter | 2002-07-02 |